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Bird 8921SC13 Ultra Stable Termaline RF Load (New)5000 Watts DC to 28 MHzUltra Stable - 13.56 MHz - Product Image
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Bird 8921SC13 Ultra Stable Termaline RF Load (New)
5000 Watts DC to 28 MHz
Ultra Stable - 13.56 MHz

Bird 8291SC13 Ultra Stable RF Load DC-28 MHz 5000 Watts

8921SC13, SC13 Series Ultra Stable RF Termination for the Semiconductor Industry For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series.


  • No warm-up time
  • Ultra stable: <0.1dB total change in VSWR from 0 to 100% rating power at 13.56 MHz
  • Passive design
  • Ultra-low VSWR - typically <1.05:1 at process critical frequencies
  • Homogeneous RF design provides long-term repeatability

Frequency Range and VSWR:
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1

Lead time for this product is 4 weeks.

Bird Specifications and Manual

Price:   $3,813.00 

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Martin RF Supply
eCommerce Office
Arlington, MA 02474

email: Sales@MartinRF.com

Phone: (781)430-0450
Fax: (781)915-0776