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Bird 8921SC13 Ultra Stable Termaline RF Load (New)Bird 8291SC13 Ultra Stable RF Load DC-28 MHz 5000 Watts
5000 Watts DC to 28 MHz
Ultra Stable - 13.56 MHz
8921SC13, SC13 Series Ultra Stable RF Termination for the Semiconductor Industry For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series.
- No warm-up time
- Ultra stable: <0.1dB total change in VSWR from 0 to 100% rating power at 13.56 MHz
- Passive design
- Ultra-low VSWR - typically <1.05:1 at process critical frequencies
- Homogeneous RF design provides long-term repeatability
Frequency Range and VSWR:
DC to 28 MHz @ 1.1 max.
VSWR less than 1.05:1
Lead time for this product is 4 weeks.
Bird Specifications and Manual
Martin RF Supply
Arlington, MA 02474